Vacuum Pump Capacity Calculation Xls Link

The fundamental equation for evacuating a chamber from atmospheric pressure to a target vacuum is:

Materials (steel, plastics, seals) release trapped molecules under vacuum. [ Q_out = \textSurface Area \times \textOutgassing Rate (specific to material) ] vacuum pump capacity calculation xls

This is the gas initially in the chamber. [ Q_vol = \fracV \times (P_1 – P_2)t ] The fundamental equation for evacuating a chamber from